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Kalrez®

Kalrez® Perfluoroelastomer Parts (FFKM)

Kalrez® is a perfluoroelastomer (FFKM) developed and manufactured by DuPont™. It belongs to the family of high-performance elastomers designed to offer exceptional chemical resistance and thermal stability in harsh industrial environments.

Unlike conventional elastomers (like NBR, EPDM, or even FKM like Viton®), Kalrez® offers superior performance in aggressive chemicals and extreme temperatures, making it the material of choice for sealing in critical applications.

Our Products

Applications

Key Features

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Ultra-High Purity

Kalrez® parts are formulated with extremely low outgassing and metal ion content, making them ideal for high-vacuum and ultra-clean environments where contamination control is critical.
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Exceptional Plasma Resistance

Engineered to withstand aggressive plasma chemistries used in dry etch, CVD, and ALD processes—minimizing seal degradation and particle generation.
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Extended Seal Life

Outstanding thermal and chemical stability leads to longer maintenance intervals, reduced downtime, and improved tool uptime and yield.
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Low Particle Generation

Designed for minimal erosion and shedding during exposure to harsh process conditions, which helps maintain process integrity and product quality.
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High Temperature Tolerance

Maintains performance in extreme temperatures—up to 327°C—common in semiconductor diffusion, oxidation, and thermal processing.
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Compatibility with Advanced Processes

Kalrez® grades like 9500 and 9300 are optimized for next-generation node manufacturing, supporting advanced process nodes and critical wafer steps.